JPS6185850U - - Google Patents
Info
- Publication number
- JPS6185850U JPS6185850U JP1984170405U JP17040584U JPS6185850U JP S6185850 U JPS6185850 U JP S6185850U JP 1984170405 U JP1984170405 U JP 1984170405U JP 17040584 U JP17040584 U JP 17040584U JP S6185850 U JPS6185850 U JP S6185850U
- Authority
- JP
- Japan
- Prior art keywords
- protection device
- fixed frame
- sintered body
- utility
- photomask protection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170405U JPS638898Y2 (en]) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170405U JPS638898Y2 (en]) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6185850U true JPS6185850U (en]) | 1986-06-05 |
| JPS638898Y2 JPS638898Y2 (en]) | 1988-03-16 |
Family
ID=30728114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984170405U Expired JPS638898Y2 (en]) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS638898Y2 (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2004191986A (ja) * | 2002-12-09 | 2004-07-08 | Asml Holding Nv | 多孔質フィルタ挿入体及び突出したボンディング面を備えたペリクルフレームのための方法及び装置 |
| US7339653B2 (en) | 2003-06-18 | 2008-03-04 | Asml Holding N.V. | System for a pellicle frame with heightened bonding surfaces |
-
1984
- 1984-11-12 JP JP1984170405U patent/JPS638898Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2004191986A (ja) * | 2002-12-09 | 2004-07-08 | Asml Holding Nv | 多孔質フィルタ挿入体及び突出したボンディング面を備えたペリクルフレームのための方法及び装置 |
| US7339653B2 (en) | 2003-06-18 | 2008-03-04 | Asml Holding N.V. | System for a pellicle frame with heightened bonding surfaces |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS638898Y2 (en]) | 1988-03-16 |